In order to make the gradient bromating amorphous hydrogenated carbon film, this article first manufactured the automation to control the Mass-Flow-Control which is produced by MKS Corporation, and has compiled this equipment automation control procedure using the VB senior programming language.
本文为制备掺溴非晶碳氢薄膜材料,首先制作了自动化控制MKS公司出产的质量流量控制计装置的接口电路,并利用VB高级编程语言编写了该装置的自动化控制程序。
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